JPH0523841Y2 - - Google Patents

Info

Publication number
JPH0523841Y2
JPH0523841Y2 JP1985134632U JP13463285U JPH0523841Y2 JP H0523841 Y2 JPH0523841 Y2 JP H0523841Y2 JP 1985134632 U JP1985134632 U JP 1985134632U JP 13463285 U JP13463285 U JP 13463285U JP H0523841 Y2 JPH0523841 Y2 JP H0523841Y2
Authority
JP
Japan
Prior art keywords
rod
cylinder
piston
chamber
bellows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985134632U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6241908U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985134632U priority Critical patent/JPH0523841Y2/ja
Publication of JPS6241908U publication Critical patent/JPS6241908U/ja
Application granted granted Critical
Publication of JPH0523841Y2 publication Critical patent/JPH0523841Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
  • Diaphragms And Bellows (AREA)
JP1985134632U 1985-09-03 1985-09-03 Expired - Lifetime JPH0523841Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985134632U JPH0523841Y2 (en]) 1985-09-03 1985-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985134632U JPH0523841Y2 (en]) 1985-09-03 1985-09-03

Publications (2)

Publication Number Publication Date
JPS6241908U JPS6241908U (en]) 1987-03-13
JPH0523841Y2 true JPH0523841Y2 (en]) 1993-06-17

Family

ID=31036055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985134632U Expired - Lifetime JPH0523841Y2 (en]) 1985-09-03 1985-09-03

Country Status (1)

Country Link
JP (1) JPH0523841Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63312502A (ja) * 1987-06-12 1988-12-21 Okuda Yasuyuki 多重シ−ルベロ−ズによる移動機構
JPH0823362B2 (ja) * 1989-02-10 1996-03-06 住友精密工業株式会社 真空環境用作動筒装置
JPH0823361B2 (ja) * 1989-02-10 1996-03-06 住友精密工業株式会社 真空環境用作動筒
DE202019004569U1 (de) * 2019-11-08 2021-02-10 Bümach Engineering International B.V. Arbeitszylinder

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421323Y2 (en]) * 1974-09-21 1979-07-28
JPS5725532Y2 (en]) * 1979-03-16 1982-06-03
JPS6166262U (en]) * 1984-10-05 1986-05-07

Also Published As

Publication number Publication date
JPS6241908U (en]) 1987-03-13

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